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Intelligent Sensing
1

Comprehensive Solutions for MEMS Pressure Sensors and Sensing Systems

Definition: We are committed to providing MEMS sensors and system products for the automotive industry. Our MEMS pressure sensor intelligent manufacturing base integrates production, academia, and research. With advanced technology development, stress model packaging technology, and efficient batch calibration testing algorithms, we have established multiple industry-leading automated intelligent sensing production lines, enabling large-scale manufacturing capabilities.

Objective: With a focus on developing high-end intelligent sensors, we leverage the strong research capabilities and interdisciplinary advantages of Wuhan University. With the support of an intelligent measurement system research platform and the opportunities presented by national strategic development, we are dedicated to technological innovation and new product development. We aim to overcome the challenges in intelligent manufacturing and sensing technology and accelerate the transformation of achievements and enterprise incubation. Our goal is to become a global supplier of comprehensive solutions for MEMS pressure sensors and sensing systems.

Research Directions:

1)Sensitive Element Design: Research the structural design, material selection, and stress isolation techniques of sensitive elements.

2)Manufacturing Process Research: Research on screen printing, resistive sintering, and laser trimming processes.

3)Packaging Technology: Research on post-processing packaging techniques for pressure sensors, including signal extraction of sensitive elements, sensor protection design, and packaging process mechanics.

4)Batch Calibration Technology: Establishing standardized batch calibration testing methods for high-temperature and high-pressure sensors.